Plasma Etcher 

Purpose : Evaluate Plasma Charateristics of Compound

·  Chamber :  APPLIED MATERIALS MxP Etch Chamber
·  Process Gas : NF3, O2, Cl2, H2, CF4, Ar, N2
·  Dry Pump
‌    Pumping Speed : 160 m3/h
·  Turbo Pump
‌    Rated speed : 48,000 RPM
‌    Pumping speed for H2 : 220 l/s
‌    Pumping speed for N2 : 300 l/s
‌    Maximum Vacuum Pressure : 10-9 Torr
·  RF Power Range : ~1,200W

 

TGA (Thermo Gravimetric Analyzer)

Purpose : Evaluate Thermal Charateristics of Compound
‌                  (Thermal decomposition temperature, Thermal stability, etc.)

·  Model : TGA 209 F1 Libra
·  Maker :NETZSCH
·  Specification
‌    Temperature range : 10 ~ 1,100 ℃
‌    Heating rate : 0.001 ~ 200 K/min
‌    Cooling time : 12 min in Nitrogen(N2)
‌                                     5 min in Helium(He)
‌    Resolution : 1 ㎍  (=0.001 mg)
‌    Furnance Materials : Ceramic

 

SEM-EDS

Purpose : Get an image of surface at high magnification 
‌                      Analyze elements of surface
‌
·  Model : EM-30AXN
·  Maker : COXEM, Bruker
·  Specification of SEM
‌     Resolution : 5 nm at 30 kV
‌     Magnification : x 20 ~ x 150,000
‌     Accelerating Voltage : 1 ~ 30 kV
‌     Electron Gun : W(Tungsten) Filament
‌     Image Mode : SE, BSE, SE+BSE Mixed image
·  Specification of EDS
‌     Resolution : 129 eV at 1,000,000 cps
‌     Detectable Element : Be(3) ~ Cf(98)‌

 

Valve Leak Tester (Horizontal, Vertical)

Purpose : Evaluate Valve Perforamance
‌
·  Type : Rocker Valve (Horizontal motion)
‌                Gate Slit Valve (Vertical motion)
·  Dry Pump
‌     Vacuum Pumping Speed : 37 m3/h
·  Turbo Pump
‌     Rated speed : 60,000 RPM
‌     Pumping speed for He : 255 l/s
‌     Pumping speed for N2 : 260 l/s
‌     Maximum Vacuum Pressure : 10-6 Torr

 

 Helium Detector

Purpose : Evaluate Valve Perforamance‌

·  Model : ASM-340
·  Maker : PFEIFER VACUUM
·  Specification
‌     Vacuum pumping speed : 15 m3/h
‌‌     Pumping speed for He : 2.5 l/s
‌     Sensible gas : 4He, 3He, H2
‌     Minimm detectable leakage rate for He : 3.75*10-12 Torr*l/s

 

Universal Test Machine (UTM)

Purpose : Evaluate Mechanical Properties of Compound

·  Model : TO-101
·  Maker : TEST ONE
‌·  Specification
‌     Max. Load capacity : 500 N
     Vertical test space : 950 mm
     Column type : Sigle Column
‌     Load resolution : 1/50,000 N
‌     Driving system : Ball Screw Type
‌     Driving motor : Stepping Motor & Reducer
    Test category : Tensile, Tear, Peel, Compression, Bending, Repeat etc.